Issue

Vol. 14 (2022)

Recent Progress on Flexible Room-Temperature Gas Sensors Based on Metal Oxide Semiconductor

https://doi.org/10.1007/s40820-022-00956-9
Lang‑Xi Ou
State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics &Systems, School of Microelectronics, Fudan University, Shanghai 200433, People’s Republic of China
Meng‑Yang Liu
State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics &Systems, School of Microelectronics, Fudan University, Shanghai 200433, People’s Republic of China
Li‑Yuan Zhu
State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics &Systems, School of Microelectronics, Fudan University, Shanghai 200433, People’s Republic of China
David Wei Zhang
State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics &Systems, School of Microelectronics, Fudan University, Shanghai 200433, People’s Republic of China
Hong‑Liang Lu
State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics &Systems, School of Microelectronics, Fudan University, Shanghai 200433, People’s Republic of China

Corresponding Author: Hong‑Liang Lu

honglianglu@fudan.edu.cn

Nano-Micro Letters, Vol. 14 (2022), Article Number: 206

Abstract

With the rapid development of the Internet of Things, there is a great demand for portable gas sensors. Metal oxide semiconductors (MOS) are one of the most traditional and well-studied gas sensing materials and have been widely used to prepare various commercial gas sensors. However, it is limited by high operating temperature. The current research works are directed towards fabricating high-performance flexible room-temperature (FRT) gas sensors, which are effective in simplifying the structure of MOS-based sensors, reducing power consumption, and expanding the application of portable devices. This article presents the recent research progress of MOS-based FRT gas sensors in terms of sensing mechanism, performance, flexibility characteristics, and applications. This review comprehensively summarizes and discusses five types of MOS-based FRT gas sensors, including pristine MOS, noble metal nanoparticles modified MOS, organic polymers modified MOS, carbon-based materials (carbon nanotubes and graphene derivatives) modified MOS, and two-dimensional transition metal dichalcogenides materials modified MOS. The effect of light-illuminated to improve gas sensing performance is further discussed. Furthermore, the applications and future perspectives of FRT gas sensors are also discussed.


Highlights:


1 Latest progress on flexible room temperature (FRT) gas sensor based on metal oxide semiconductors (MOS) is comprehensively reviewed.
2 FRT gas sensor based on pristine MOS and MOS modified with noble metal nanoparticles, organic polymers, carbon based materials and transition metal dichalcogenide materials are meticulously reviewed.
3 The gas sensing mechanism of MOS chemiresistive gas sensors are introduced and the applications, future perspectives, and challenges of FRT gas sensors are also proposed.

Keywords

Metal oxide semiconductor Flexible gas sensor Room temperature Nanomaterials
Ou, Lang‑Xi, Meng‑Yang Liu, Li‑Yuan Zhu, David Wei Zhang, and Hong‑Liang Lu. 2022. “Recent Progress on Flexible Room-Temperature Gas Sensors Based on Metal Oxide Semiconductor”. Nano-Micro Letters 14 (October):206. https://doi.org/10.1007/s40820-022-00956-9.
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