A Bionic Fish Cilia Median-Low Frequency Three-Dimensional Piezoresistive MEMS Vector Hydrophone
Corresponding Author: Zhen Li
Nano-Micro Letters,
Vol. 6 No. 2 (2014), Article Number: 136-142
Abstract
A bionic fish cilia median-low frequency three-dimensional MEMS vector hydrophone is reported in this paper. The piezoresistive reasonable position was obtained through finite element analysis by ANSYS and the structure was formed by MEMS processes including lithography, ion implantation, PECVD and etching, etc. The standing wave barrel results show that the lowest sensitivity of the hydrophone is −200 dB and reach up to −160 dB (in which the voltage amplification factor is 300). It has a good frequency response characteristics in 25 Hz ∼ 1500 Hz band. Directivity tests displayed that the hydrophone has a good “8”-shaped directivity, in which the resolution is not less than 30 dB, and asymmetry of the maximum axial sensitivity value is less than 1.2 dB.
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- Y. Yu, Jun-ying Hui, Y. Chen, Guo-cang Sun and C. Teng, “Research on target depth classification in low frequency acoustics field of shallow water”, Acta Phys. Sin. 58(9), 6335–6343 (2009).
- Ian F. Akyildiz, Dario Pompili and Tommaso Melodia, “Underwater acoustic sensor networks: research challenges”, Ad Ho. Networks 3(3), 257–279 (2005). http://dx.doi.org/10.1016/j.adhoc.2005.01.004
- Guojun Zhang, Panpan Wang, Linggang Guan, Jijun Xiong and Wendong Zhang, “Improvement of the MEMS bionic vector hydrophone”, Microelectr. J. 42(5), 815–819 (2011). http://dx.doi.org/10.1016/j.mejo.2011.01.002
- Jun-wei Zhao, Hua-wei Chen and Jin-ming Li, “Research on passive acoustics-guidance system based on vector hydrophones”, J. Harbin Eng. Univ. 25(1), 25–29 (2004).
- Li-jie Chen, Peng Zhang, Xing-ye Xu and Fu-jiang Wang, “Overview of vector hydrophone”, Transducer and Micro-system Technologies 6, 5–8 (2006).
- Guojun Zhang, Shang Chen and Chenyang Xue, “Bionic encapsulation of a hair cell vector hydrophone based on MEMS”, Nanotechnology and Precision Engineering 7(3), 221–225 (2009).
- Mohamed Gad-el-Hak, “MEMS design and fabrication”, China Machine Press, Beijing, China, 49–52 (2010).
- Jiao Xu, Guojun Zhang, Guixiong Shi, Xiaoyao Wang, Xibao Liu and Wendong Zhang, “Advancements in encapsulation of hair vector hydrophone”, Chinese Journal of Structural Chemistry 24(4), 1–5 (2011).
- Sungjoon Choi, Haksue Lee and Wonkyu Moon, “A micro-machined piezoelectric hydrophone with hydrostatically balanced air backing”, Sens. & Act. A 158(1), 60–71 (2010). http://dx.doi.org/10.1016/j.sna.2009.12.019
- V. A. Cordienko, E. L. Gordienko and A. V. Dryndin, “Absoulte pressure calibration of acoustic receivers in a vibrating column of liquid”, Acoust. Phys. 40(2), 219–222 (1994).
- Shang Chen, “Research of MEMS bionic vector hydrophone based on silicon”, Dissertation for the Degree of M. Eng. of North University of China, 2008.
References
Y. Yu, Jun-ying Hui, Y. Chen, Guo-cang Sun and C. Teng, “Research on target depth classification in low frequency acoustics field of shallow water”, Acta Phys. Sin. 58(9), 6335–6343 (2009).
Ian F. Akyildiz, Dario Pompili and Tommaso Melodia, “Underwater acoustic sensor networks: research challenges”, Ad Ho. Networks 3(3), 257–279 (2005). http://dx.doi.org/10.1016/j.adhoc.2005.01.004
Guojun Zhang, Panpan Wang, Linggang Guan, Jijun Xiong and Wendong Zhang, “Improvement of the MEMS bionic vector hydrophone”, Microelectr. J. 42(5), 815–819 (2011). http://dx.doi.org/10.1016/j.mejo.2011.01.002
Jun-wei Zhao, Hua-wei Chen and Jin-ming Li, “Research on passive acoustics-guidance system based on vector hydrophones”, J. Harbin Eng. Univ. 25(1), 25–29 (2004).
Li-jie Chen, Peng Zhang, Xing-ye Xu and Fu-jiang Wang, “Overview of vector hydrophone”, Transducer and Micro-system Technologies 6, 5–8 (2006).
Guojun Zhang, Shang Chen and Chenyang Xue, “Bionic encapsulation of a hair cell vector hydrophone based on MEMS”, Nanotechnology and Precision Engineering 7(3), 221–225 (2009).
Mohamed Gad-el-Hak, “MEMS design and fabrication”, China Machine Press, Beijing, China, 49–52 (2010).
Jiao Xu, Guojun Zhang, Guixiong Shi, Xiaoyao Wang, Xibao Liu and Wendong Zhang, “Advancements in encapsulation of hair vector hydrophone”, Chinese Journal of Structural Chemistry 24(4), 1–5 (2011).
Sungjoon Choi, Haksue Lee and Wonkyu Moon, “A micro-machined piezoelectric hydrophone with hydrostatically balanced air backing”, Sens. & Act. A 158(1), 60–71 (2010). http://dx.doi.org/10.1016/j.sna.2009.12.019
V. A. Cordienko, E. L. Gordienko and A. V. Dryndin, “Absoulte pressure calibration of acoustic receivers in a vibrating column of liquid”, Acoust. Phys. 40(2), 219–222 (1994).
Shang Chen, “Research of MEMS bionic vector hydrophone based on silicon”, Dissertation for the Degree of M. Eng. of North University of China, 2008.