Issue

Vol. 18 (2026)

Recent Advances of Atomic/Molecular Layer Deposition Engineering Silicon Interface for Lithium-Ion Batteries

https://doi.org/10.1007/s40820-026-02259-9
Haocheng Wen
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China
Yuhui Xu
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China
Xiaoxue Wang
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China
Ming Li
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China
Lulu Zhang
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China
Huaming Qian
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China
Jia Kang
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China
Xuexia Song
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China
Yetong Li
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China
Jingjing Wang
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China
Jiujun Zhang
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China
Xifei Li
Institute of Advanced Electrochemical Energy and School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, Shaanxi 710048, People’s Republic of China

Corresponding Author: Xifei Li

xfli@xaut.edu.cn

Nano-Micro Letters, Vol. 18 (2026), Article Number: 405

Abstract

Despite the ultra-high theoretical capacity of silicon (Si) anodes, their practical application is severely hindered by drastic volume effect and an unstable solid-electrolyte interphase (SEI). Atomic/molecular layer deposition (ALD/MLD) technology exhibits unique advantages in mitigating these challenges by constructing a stable and functionalized interface on Si anodes. This review summarizes recent advances and presents perspectives on ALD/MLD for Si anode interface engineering. Firstly, the existing interfacial challenges are analyzed: mechanical failure and structural degradation, complex/unstable SEI, and insufficient interfacial charge transfer. Subsequently, the key role and mechanism of ALD/MLD in enhancing the performance of Si anodes are elucidated from an atomic/molecular-scale interface engineering perspective. Crucially, three key aspects are emphasized: enhancing structural stability through mechanical confinement and stress dissipation, inducing the formation of stable SEI via ingenious interface chemical design, and constructing efficient ion/electron transport channels to optimize interfacial charge transfer kinetics. Finally, future research directions on ALD/MLD for Si anode interface engineering are proposed.


Hightlights:
1 Reveals the chemical-mechanical coupled process of interfacial failure in Si anodes.
2 Elucidates the core role of atomic/molecular layer deposition via atomic/molecular-scale interface engineering.
3 Demonstrates how tailored interfaces solve stability, solid-electrolyte interphase, and kinetics problems.

Keywords

Atomic layer deposition Molecular layer deposition Si anodes Lithium-ion batteries Interfacial Engineering
Wen, Haocheng, Yuhui Xu, Xiaoxue Wang, Ming Li, Lulu Zhang, Huaming Qian, Jia Kang, Xuexia Song, Yetong Li, Jingjing Wang, Jiujun Zhang, and Xifei Li. 2026. “Recent Advances of Atomic/Molecular Layer Deposition Engineering Silicon Interface for Lithium-Ion Batteries”. Nano-Micro Letters 18 (June):405. https://doi.org/10.1007/s40820-026-02259-9.
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