Han C, Chen D, Zhang Y, Xu D, Liu Y, Kong ES-W, Zhang Y. High Potential Columnar Nanocrystalline AlN Films Deposited by RF Reactive Magnetron Sputtering. Nano-Micro Lett [Internet]. 2012Mar.19 [cited 2024Nov.17];4(1):40-4. Available from: https://mail.nmlett.org/index.php/nml/article/view/723