Kang HS, Lee K-H, Yang D-Y, You BH, Song I-H. Micro-accelerometer Based on Vertically Movable Gate Field Effect Transistor. Nano-Micro Lett [Internet]. 2015May6 [cited 2024Nov.17];7(3):282-90. Available from: https://mail.nmlett.org/index.php/nml/article/view/564