Sun, Shenghua, Peng Lu, Jun Xu, Ling Xu, Kunji Chen, Qimin Wang, and Yuhua Zuo. “Fabrication of Anti-Reflecting Si Nano-Structures With Low Aspect Ratio by Nano-Sphere Lithography Technique”. Nano-Micro Letters 5, no. 1 (March 10, 2013): 18-25. Accessed November 17, 2024. https://mail.nmlett.org/index.php/nml/article/view/675.