Sun, S., Lu, P., Xu, J., Xu, L., Chen, K., Wang, Q., & Zuo, Y. (2013). Fabrication of Anti-reflecting Si Nano-structures with Low Aspect Ratio by Nano-sphere Lithography Technique. Nano-Micro Letters, 5(1), 18-25. https://doi.org/10.1007/BF03353727