Sun, S., Lu, P., Xu, J., Xu, L., Chen, K., Wang, Q. and Zuo, Y. 2013. Fabrication of Anti-reflecting Si Nano-structures with Low Aspect Ratio by Nano-sphere Lithography Technique. Nano-Micro Letters. 5, 1 (Mar. 2013), 18-25. DOI:https://doi.org/10.1007/BF03353727.